Shutdown stsetch SNF 2008-03-20 15:22:44: Loadlock pumpdown time exceeded

chughes at snf.stanford.edu chughes at snf.stanford.edu
Thu Mar 20 15:22:44 PDT 2008


           When I loaded my wafer, the loadlock refused to pumpdown low enough in pressure to start my process.; there appear to be some adhesive on the o-ring. I got a "pump out time exceeded error", and there doesn't seem to be any way I can clear it. It may have to wait until tomorrow for Elmer.




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