From ktorashima at snf.stanford.edu Tue Nov 4 16:32:19 2008 From: ktorashima at snf.stanford.edu (ktorashima at snf.stanford.edu) Date: Tue, 4 Nov 2008 16:32:19 -0800 Subject: Problem stsetch SNF 2008-11-04 16:32:18: non-uniform plasma Message-ID: Rings observed in plasma, even during O2 clean. Etch is not uniform From ktorashima at snf.stanford.edu Tue Nov 4 20:28:25 2008 From: ktorashima at snf.stanford.edu (ktorashima at snf.stanford.edu) Date: Tue, 4 Nov 2008 20:28:25 -0800 Subject: Problem stsetch SNF 2008-11-04 20:28:24: over pressure Message-ID: chamber has gone over pressure to around 100mTorr during etch. tried for DEEP and FASTDEEP and they are the same. has to stop etching beacuse of this problem. From ktorashima at snf.stanford.edu Wed Nov 5 12:59:17 2008 From: ktorashima at snf.stanford.edu (ktorashima at snf.stanford.edu) Date: Wed, 5 Nov 2008 12:59:17 -0800 Subject: Problem stsetch SNF 2008-11-05 12:59:17: over pressure Message-ID: same as yesterday From latta at snf.stanford.edu Wed Nov 5 16:38:30 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 5 Nov 2008 16:38:30 -0800 Subject: Problem stsetch SNF 2008-11-05 16:38:29: Chamber pressure strays to 90mT Message-ID: I was watching the ISO recipe w/ Chris Kenney. He reports that the pressure had been a stable 40mT, but now rises to 90mT over five minutes. It stays at 90mT. His etch rate is considerably lower. Do not use the tool for critical etches. From eenriquez at snf.stanford.edu Thu Nov 6 12:52:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Nov 2008 12:52:26 -0800 Subject: Comment stsetch SNF 2008-11-06 12:52:25: Over press update Message-ID: The plan is to repair the chamber door leak and replace the turbo pump starting Wed 11/12. The work should be completed by 11/14. From news at discount-educational-software.net Thu Nov 6 13:30:49 2008 From: news at discount-educational-software.net (Education Software News) Date: Thu, 6 Nov 2008 13:30:49 -0800 Subject: Education Software News - November 2008 Message-ID: <4c3074aa368ac4437389efbc2353de@mail> Adobe's new CS4 Creative Suite has just been released! Exciting new features and capabilities run throughout the entire CS4 productline. Check out the CS4 pricing below. Computer Products for Education is pleased to provide Academic Software News to current students, faculty, staff, and schools with news, pricing, and availability of Academic Edition Software from Microsoft, Adobe, Autodesk, Corel, Quark, FileMaker, EndNote and many other major software manufacturers. Please visit our website for more information: http://www.discount-educational-software.us or call 800-679-7007. Educational software is exclusively available to Qualified Students, Faculty, Staff and Schools of K-12 and Higher Education institutions. (see below for details) ------ Education Prices for November 2008 -------- ---------------------- Education Standard You ADOBE Price Retail Save! ---------------------- --------- ------ ----- Acrobat 9.0 Pro Extended $222.95 $699 68% Acrobat 9.0 Professional $154.95 $499 69% After Effects CS4 $359.95 $999 64% CS4 Design Premium $598.95 $1799 67% CS4 Design Standard $449.95 $1399 68% CS4 Master Collection $998.95 $2499 60% CS4 Production Premium $598.95 $1699 65% CS4 Web Premium $549.95 $1699 68% CS4 Web Standard $398.95 $999 60% Dreamweaver CS4 $199.95 $399 50% Flash Professional CS4 $249.95 $699 64% Illustrator CS4 $199.95 $599 67% InDesign CS4 $199.95 $699 71% Photoshop Elem+Premiere Elem 7.0 $118.95 $180 34% Photoshop Elements 7.0 $68.95 $140 51% Photoshop Extendend CS4 $298.95 $999 70% Premiere Elements 7.0 $69.95 $140 50% Premiere Professional CS4 $349.95 $799 56% Soundbooth CS4 $79.95 $199 60% http://www.discount-educational-software.us/adobe.html (1) CS4 Design Premium includes: InDesign, Photoshop Extended, Illustrator, Flash Pro, Dreamweaver, and Acrobat 9 Pro (2) CS4 Design Standard includes: InDesign, Photoshop, Illustrator, and Acrobat 9 Pro (3) CS4 Master Collection includes: InDesign, Photoshop Extended, Illustrator, Flash Pro, Dreamweaver, Contribute, Fireworks, After Effects Pro, Premiere Pro, Soundbooth, Encore, OnLocation, Ultra, and Acrobat 9 Pro (4) CS4 Production Premium includes: Photoshop Extended, Illustrator, Flash Pro, After Effects Pro, Premiere Pro, Encore, OnLocation, and Ultra (5) CS4 Web Pemium includes: Photoshop Extended, Illustrator, Acrobat 9 Pro, Flash Pro, Dreamweaver, Contribute, and Fireworks (6) CS4 Web Standard includes: Flash Pro, Dreamweaver, Contribute, and Fireworks ---------------------- Education Standard You MICROSOFT Price Retail Save! ---------------------- --------- ------ ----- Expressions Web 2.0 $59.95 $150 60% Office 2007 Home & Student(1) $148.95 $399 63% Office 2007 Professional(3) $189.95 $499 62% Office 2007 Standard(2) $148.95 $399 63% Office 2007 Ultimate(4) $259.95 $679 62% Office 2008 for Macintosh $148.95 $500 70% Powerpoint 2007 $118.95 $229 48% Project 2007 Professional $198.95 $999 80% Project 2007 Standard $69.95 $349 80% Visio 2007 Professional $159.95 $559 71% Visio 2007 Standard $84.95 $259 67% Visual Studio 2008 Pro $109.95 $899 88% Windows Vista Business Full SP1 $164.95 $290 43% Windows Vista HomePrem Full SP1 $129.95 - - Windows Vista HomePrem Upgrade $74.95 $200 63% Windows Vista Ultimate Full SP1 $219.95 $399 45% http://www.discount-educational-software.us/microsoft.html (1)Office 2007 Home & Student includes: Word, Excel, PowerPoint, OneNote. (2)Office 2007 Standard includes: Word, Excel, PowerPoint, Outlook. (3)Office 2007 Professional includes: Word, Excel, PowerPoint, Outlook, Access, Publisher. (4)Office 2007 Ultimate includes: Word, Excel, PowerPoint, Outlook, Access, Publisher, Groove, InfoPath. ---------------------- Education Standard You AUTODESK Price Retail Save! ---------------------- --------- ------ ----- 3ds Max 2009 SuperPak 1-Yr Lic $198.95 $3495 94% 3ds Max Design 2008 1-Yr Lic $98.95 $3495 97% AutoCad 2009 1-Yr License $158.95 $3750 96% AutoCad 2009 Perpetual License $379.95 $3750 90% AutoCad Architecture 2009 1-Yr L $155.95 $4995 97% Inventor Professional 2009 1-Yr $155.95 $159 2% Maya Unlimited Superpack Perp. $388.95 $6630 94% http://www.discount-educational-software.us/autodesk.html These Autodesk prices are for Students, Faculty, & Staff for personal use - pricing for schools for institutional/class-room lab use is different. Please call 800-679-7007 for more information. ---------------------- Education Standard You AVID Price Retail Save! ---------------------- --------- ------ ----- Avid Media Composer $294.95 $2495 88% Avid Xpress Pro 5.7 HD $289.95 $1695 83% Media Composer Studio $994.95 $3495 72% Pinnacle Liquid 7.2 $159.95 $999 84% http://www.discount-educational-software.us/avid.html For more information, visit our website at: http://www.discount-educational-software.us or call 800-679-7007. School purchase orders may be faxed to: 800-679-6996. Educational Software has the exact same features and functionality as Commercial Full-Versions of the software. Visit our website to view thousands of other items and accessories available from CPE at similar discounts. All software products from CPE are authentic original software from the manufacturer. These are not pirated software copies. All software comes in original manufacturer's packaging and contains a valid verifiable license. ------------------------- Volume Licensing: ------------------------- For volume licensing information for schools for quantities of five to ten (5-10) or more units of software, depending on the product(s), please call 800-679-7007 for more information. ---------------------------------------- Qualified Educational Buyers: ---------------------------------------- The following are defined as Qualified Education Buyers. Qualified Educational Buyers must provide the below verification upon making any purchase. 1. Students of Higher Education - All enrolled college, junior college, community college, technical school, vocational school, and university students. 2. K-12 Students - K-12 students are eligible for most, but not all, academic-edition software products. 3. Teachers - All K-12 school and Higher Education institution teachers. 4. K-12 school and Higher Education institution faculty. 5. Staff - All K-12 school and Higher Education institution staff. 6. Schools - All elementary, middle and high schools (K-12 schools); vocational and technical schools; correspondence schools, including Internet correspondence schools, and all colleges, including junior and community colleges, and universities. 7. Home Schools - Home schools are now eligible to purchase most Academic Edition software. Home schools must be approved on a case by case basis. Please call for more details. ------------------------- Verification: ------------------------- Purchasers must provide fax-verification of status as being a current faculty, staff, or student. After placing your order, you simply fax to CPE either: (a) a copy of a current picture School I.D. Card; or, (b) a current paycheck stub with an alternative picture I.D. (drivers license, etc.) Sensitive information may be blacked out; or (c) Schools may purchase by faxing a valid school purchase order. For more details, call us or visit our website. ------------------------- CPE is an Authorized Education Reseller for Microsoft, Adobe, Macromedia, AutoDesk, Corel, Sony, Avid, Pinnacle, Symantec and many other major software manufacturers. CPE is a national software distributor committed to providing the best prices and the best customer service to the Education Community!! Prices generally remain unchanged until the end of the month. However, all prices and availability are subject to change without notice, due to factors outside our control. __________________________ We hope you have found this message valuable. However, if you do not wish to receive any more newsletters from CPE, please use the following link: http://www.discount-educational-software.us/rem.asp?a=remv&e=stsetch-pcs at snf.stanford.edu Or call 800-679-7007 for additional options. __________________________ Sincerely, Computer Products for Education 5325 140th Avenue North Clearwater, Florida 33760 Tel: 800-679-7007 Fax: 800-679-6996 newsletter at discount-educational-software.us ___________________ THANK YOU!!! From eenriquez at snf.stanford.edu Wed Nov 12 06:51:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Nov 2008 06:51:50 -0800 Subject: Shutdown stsetch SNF 2008-11-12 06:51:50: Door seal repair Message-ID: Will also replace the turbo and various seals. From eenriquez at snf.stanford.edu Fri Nov 14 16:12:23 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Nov 2008 16:12:23 -0800 Subject: Comment stsetch SNF 2008-11-14 16:12:22: Update Message-ID: System is down for a shorted lid heater. Completed the annual PM. Replaced door seal + many other seals. Installed a new turbo pump. Ran a 30 min O2 plasma clean with no problems (had to disconnect the lid heater and change the heater setpoint). From gzxqfy at 11.com Sat Nov 15 00:56:25 2008 From: gzxqfy at 11.com (New Bridge Translation Expert) Date: Sat, 15 Nov 2008 16:56:25 +0800 Subject: =?GB2312?B?0MLHxdGnyvW3rdLru/q5uQ==?= Message-ID: An HTML attachment was scrubbed... URL: From eenriquez at snf.stanford.edu Mon Nov 17 08:09:40 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:09:40 -0800 Subject: Comment stsetch SNF 2008-11-14 16:12:22: Update Message-ID: Dried out heater contacts. Heated up the lid to 45 C with no problems. Ran 30 min O2 clean. From eenriquez at snf.stanford.edu Mon Nov 17 08:13:29 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:13:29 -0800 Subject: Shutdown stsetch SNF 2008-11-12 06:51:50: Door seal repair Message-ID: Completed the annual PM. Replaced door seal + many other seals. Installed a new turbo pump. From eenriquez at snf.stanford.edu Mon Nov 17 08:13:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:13:38 -0800 Subject: Comment stsetch SNF 2008-11-06 12:52:25: Over press update Message-ID: Completed the annual PM. Replaced door seal + many other seals. Installed a new turbo pump. From eenriquez at snf.stanford.edu Mon Nov 17 08:13:44 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:13:44 -0800 Subject: Problem stsetch SNF 2008-11-05 16:38:29: Chamber pressure strays to 90mT Message-ID: Completed the annual PM. Replaced door seal + many other seals. Installed a new turbo pump. From eenriquez at snf.stanford.edu Mon Nov 17 08:13:51 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:13:51 -0800 Subject: Problem stsetch SNF 2008-11-05 12:59:17: over pressure Message-ID: Completed the annual PM. Replaced door seal + many other seals. Installed a new turbo pump. From eenriquez at snf.stanford.edu Mon Nov 17 08:13:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:13:57 -0800 Subject: Problem stsetch SNF 2008-11-04 20:28:24: over pressure Message-ID: Completed the annual PM. Replaced door seal + many other seals. Installed a new turbo pump. From eenriquez at snf.stanford.edu Mon Nov 17 08:14:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:14:06 -0800 Subject: Problem stsetch SNF 2008-11-04 16:32:18: non-uniform plasma Message-ID: Completed the annual PM. Replaced door seal + many other seals. Installed a new turbo pump. From eenriquez at snf.stanford.edu Mon Nov 17 08:14:13 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:14:13 -0800 Subject: Problem stsetch SNF 2008-10-22 09:16:51: Ch. isolation valve leak Message-ID: Completed the annual PM. Replaced door seal + many other seals. Installed a new turbo pump. From eenriquez at snf.stanford.edu Mon Nov 17 08:14:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:14:33 -0800 Subject: Comment stsetch SNF 2008-09-23 16:14:38: Sept process quals Message-ID: Archived From eenriquez at snf.stanford.edu Mon Nov 17 08:18:39 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 08:18:39 -0800 Subject: Problem stsetch SNF 2008-11-17 08:18:38: Needs a process qual Message-ID: Process qualification has not been performed. Please check your process etch rate before committing your actual devices. From latta at snf.stanford.edu Tue Nov 18 16:57:31 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 18 Nov 2008 16:57:31 -0800 Subject: Comment stsetch SNF 2008-11-18 16:57:31: Quals after Turbo Replacement Message-ID: Used DEEP recipe for 00:10:00 Etch rate Si = 1.88um/min Etch rate PR = 248A/min Selectivity Si : PR = 75.8 : 1 From latta at snf.stanford.edu Tue Nov 18 17:00:09 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 18 Nov 2008 17:00:09 -0800 Subject: Problem stsetch SNF 2008-11-17 08:18:38: Needs a process qual Message-ID: Quals completed- pls ck comments. From nharjee at snf.stanford.edu Tue Nov 18 18:28:21 2008 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Tue, 18 Nov 2008 18:28:21 -0800 Subject: Comment stsetch SNF 2008-11-18 18:28:20: Another data point Message-ID: FYI, I ran DEEP for 12 min. My 100 um wide trenches were etched 24 um, yielding an etch rate of 2 um/min. From petzold at snf.stanford.edu Wed Nov 19 16:46:36 2008 From: petzold at snf.stanford.edu (petzold at snf.stanford.edu) Date: Wed, 19 Nov 2008 16:46:36 -0800 Subject: Comment stsetch SNF 2008-11-19 16:46:36: A third data point Message-ID: Ran two backside etches (450 um handle thickness) using the DEEP recipe. Total etch times were 2:59 and 2:51, corresponding to an etch rate of ~ 2.55 um/min. From petzold at snf.stanford.edu Sat Nov 22 21:37:44 2008 From: petzold at snf.stanford.edu (petzold at snf.stanford.edu) Date: Sat, 22 Nov 2008 21:37:44 -0800 Subject: Problem stsetch SNF 2008-11-22 21:37:43: Wafer piece on platen Message-ID: Previous user reported that half of his wafer was missing and that the chuck was unseated after the wafer was unloaded. The missing half of the wafer is stuck on the platen. From jcdoll at snf.stanford.edu Sun Nov 23 16:01:12 2008 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 23 Nov 2008 16:01:12 -0800 Subject: Comment stsetch SNF 2008-11-23 16:01:11: broken wafer cleared Message-ID: eric p removed the broken wafer from the chamber. ran an o2 clean and plasma appears to be stable. From latta at snf.stanford.edu Wed Nov 26 15:07:17 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 26 Nov 2008 15:07:17 -0800 Subject: Problem stsetch SNF 2008-11-22 21:37:43: Wafer piece on platen Message-ID: wafer removed From dgrbovic at snf.stanford.edu Sun Nov 30 15:23:18 2008 From: dgrbovic at snf.stanford.edu (dgrbovic at snf.stanford.edu) Date: Sun, 30 Nov 2008 15:23:18 -0800 Subject: Shutdown stsetch SNF 2008-11-30 15:23:17: Wafer broke inside chamber Message-ID: Holder was used so most of it is out, but there are still pieces remaining in the chamber. From ericp at snf.stanford.edu Sun Nov 30 17:07:14 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 30 Nov 2008 17:07:14 -0800 Subject: Comment stsetch SNF 2008-11-30 17:07:13: CLEARED broken wafer Message-ID: Machine is ready for O2CLEAN and test. Leakrate is good. OK to clear shutdown for testing. From shott at snf.stanford.edu Sun Nov 30 17:49:26 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 30 Nov 2008 17:49:26 -0800 Subject: Shutdown stsetch SNF 2008-11-30 15:23:17: Wafer broke inside chamber Message-ID: Eric cleared the wafer and believes that the machine is fine, so I'm clearing the shutdown to allow usage this evening. John From shott at snf.stanford.edu Sun Nov 30 17:50:24 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 30 Nov 2008 17:50:24 -0800 Subject: Comment stsetch SNF 2008-11-30 17:07:13: CLEARED broken wafer Message-ID: Wafer cleared for oxygen clean, further testing, and, hopefully, continued processing. John