From wpeng at snf.stanford.edu Wed Oct 1 14:09:43 2008 From: wpeng at snf.stanford.edu (wpeng at snf.stanford.edu) Date: Wed, 1 Oct 2008 14:09:43 -0700 Subject: Shutdown stsetch SNF 2008-10-01 14:09:42: holder did not place center and inside chamber Message-ID: From eenriquez at snf.stanford.edu Wed Oct 1 15:38:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Oct 2008 15:38:49 -0700 Subject: Shutdown stsetch SNF 2008-10-01 14:09:42: holder did not place center and inside chamber Message-ID: Vented the chamber and recovered the carrier wafer. Wipe down the platten and ran an O2 plasma. From takuyan at snf.stanford.edu Sun Oct 12 14:19:47 2008 From: takuyan at snf.stanford.edu (takuyan at snf.stanford.edu) Date: Sun, 12 Oct 2008 14:19:47 -0700 Subject: Problem stsetch SNF 2008-10-12 14:19:46: broken wafer Message-ID: I found a wafer is broken in the process chamber. Elmer, could you tatke outside? -Takuya From mtan at snf.stanford.edu Sun Oct 12 15:03:41 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 12 Oct 2008 15:03:41 -0700 Subject: Shutdown stsetch SNF 2008-10-12 15:03:41: broken wafer Message-ID: There is a large wafer piece broken unside the chamber. From ericp at snf.stanford.edu Mon Oct 13 00:12:05 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 13 Oct 2008 00:12:05 -0700 Subject: Comment stsetch SNF 2008-10-13 00:12:04: CLEARED: broken wafer piece removed. Message-ID: The broken piece has been removed. Leak rate is acceptable (2.5 mT/min). Ok to put back to yellow/green. From eenriquez at snf.stanford.edu Mon Oct 13 08:35:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Oct 2008 08:35:31 -0700 Subject: Shutdown stsetch SNF 2008-10-12 15:03:41: broken wafer Message-ID: Did a test run with no problems From eenriquez at snf.stanford.edu Tue Oct 14 07:38:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Oct 2008 07:38:04 -0700 Subject: Comment stsetch SNF 2008-10-13 00:12:04: CLEARED: broken wafer piece removed. Message-ID: Mike cycled a wafer and ran an O2 plasma clean. From eenriquez at snf.stanford.edu Tue Oct 14 07:38:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Oct 2008 07:38:43 -0700 Subject: Problem stsetch SNF 2008-10-12 14:19:46: broken wafer Message-ID: Eric cleared the broken wafer. From cfchiang at snf.stanford.edu Tue Oct 21 18:16:32 2008 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Tue, 21 Oct 2008 18:16:32 -0700 Subject: Shutdown stsetch SNF 2008-10-21 18:16:32: broken wafer Message-ID: I tried to use FASTDEEP recipe for 20min etching on my wafer. It's a 300um thick silicon wafer. From cfchiang at snf.stanford.edu Tue Oct 21 18:17:31 2008 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Tue, 21 Oct 2008 18:17:31 -0700 Subject: Problem stsetch SNF 2008-10-21 18:17:30: broken wafer Message-ID: there are some broken silicon pieces inside the etching chamber From eenriquez at snf.stanford.edu Wed Oct 22 09:11:03 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 09:11:03 -0700 Subject: Shutdown stsetch SNF 2008-10-21 18:16:32: broken wafer Message-ID: Vented the chamber and removed the wafer pieces. Wet cleaned the electrode and ran an O2 plasma. The wafer breakage was caused by a heavy coating of resist on the back of the wafer which caused the wafer to stick to the o-ring and ceramic ring. From eenriquez at snf.stanford.edu Wed Oct 22 09:11:14 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 09:11:14 -0700 Subject: Problem stsetch SNF 2008-10-21 18:17:30: broken wafer Message-ID: Vented the chamber and removed the wafer pieces. Wet cleaned the electrode and ran an O2 plasma. The wafer breakage was caused by a heavy coating of resist on the back of the wafer which caused the wafer to stick to the o-ring and ceramic ring. From eenriquez at snf.stanford.edu Wed Oct 22 09:16:00 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 09:16:00 -0700 Subject: Problem stsetch SNF 2008-08-12 10:46:26: Chamber isolation valve leaks Message-ID: We will replace the chamber iso valve o-ring during the holiday shutdown. It will take about 4 days to perform the work because the chamber and the loadlock module will have to be separated in order to access the o-ring. From eenriquez at snf.stanford.edu Wed Oct 22 09:16:52 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 09:16:52 -0700 Subject: Problem stsetch SNF 2008-10-22 09:16:51: Ch. isolation valve leak Message-ID: We will replace the chamber iso valve o-ring during the holiday shutdown. It will take about 4 days to perform the work because the chamber and the loadlock module will have to be separated in order to access the o-ring. From latta at snf.stanford.edu Wed Oct 22 09:21:06 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 22 Oct 2008 09:21:06 -0700 Subject: Comment stsetch SNF 2008-08-21 07:15:19: Update on isolation valve leak Message-ID: new update From mtan at snf.stanford.edu Wed Oct 22 12:46:27 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Wed, 22 Oct 2008 12:46:27 -0700 Subject: Shutdown stsetch SNF 2008-10-22 12:46:26: wafer broke inside the chamber Message-ID: From eenriquez at snf.stanford.edu Wed Oct 22 17:05:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 17:05:26 -0700 Subject: Shutdown stsetch SNF 2008-10-22 12:46:26: wafer broke inside the chamber Message-ID: Cleaned the chamber and installed a new lip seal. Cycled wafers and ran an O2 plasma. From mtan at snf.stanford.edu Fri Oct 24 18:10:07 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 24 Oct 2008 18:10:07 -0700 Subject: Problem stsetch SNF 2008-10-24 18:10:07: wafer broke inside Message-ID: Wafer broke off during unloading. Waiting for Eric to help retrieving the broken pieces. From cbaxter at snf.stanford.edu Sat Oct 25 07:41:19 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 25 Oct 2008 07:41:19 -0700 Subject: Shutdown stsetch SNF 2008-10-25 07:41:19: broken wafer.. Message-ID: From cbaxter at snf.stanford.edu Sat Oct 25 09:33:54 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 25 Oct 2008 09:33:54 -0700 Subject: Shutdown stsetch SNF 2008-10-25 07:41:19: broken wafer.. Message-ID: Vented chamber and vacuum brpken wafers. From cbaxter at snf.stanford.edu Sat Oct 25 09:34:39 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 25 Oct 2008 09:34:39 -0700 Subject: Problem stsetch SNF 2008-10-24 18:10:07: wafer broke inside Message-ID: Vacuumed broken wafer chips. From cfchiang at snf.stanford.edu Mon Oct 27 00:49:11 2008 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Mon, 27 Oct 2008 00:49:11 -0700 Subject: Problem stsetch SNF 2008-10-27 00:49:10: software problem Message-ID: When tried to rerun the software after it was forced-finished with warning message, a terminal look-a-like program was on the screen. And can't go back to the original one. From cearhart at snf.stanford.edu Mon Oct 27 19:41:15 2008 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Mon, 27 Oct 2008 19:41:15 -0700 Subject: Shutdown stsetch SNF 2008-10-27 19:41:15: Message-ID: From cearhart at snf.stanford.edu Mon Oct 27 19:42:21 2008 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Mon, 27 Oct 2008 19:42:21 -0700 Subject: Problem stsetch SNF 2008-10-27 19:42:16: Wafer broken Message-ID: My wafer broke in the chamber. From eenriquez at snf.stanford.edu Tue Oct 28 11:25:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Oct 2008 11:25:26 -0700 Subject: Shutdown stsetch SNF 2008-10-27 19:41:15: Message-ID: Cleaned chamber. It looks like the user's wafer just got too thin and blew out. Ran O2 clean and cycled wafers. From eenriquez at snf.stanford.edu Tue Oct 28 11:25:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Oct 2008 11:25:34 -0700 Subject: Problem stsetch SNF 2008-10-27 19:42:16: Wafer broken Message-ID: Cleaned chamber. It looks like the user's wafer just got too thin and blew out. Ran O2 clean and cycled wafers. From eenriquez at snf.stanford.edu Tue Oct 28 11:27:03 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Oct 2008 11:27:03 -0700 Subject: Problem stsetch SNF 2008-10-27 00:49:10: software problem Message-ID: Restarted program. From petzold at snf.stanford.edu Wed Oct 29 07:28:03 2008 From: petzold at snf.stanford.edu (petzold at snf.stanford.edu) Date: Wed, 29 Oct 2008 07:28:03 -0700 Subject: Shutdown stsetch SNF 2008-10-29 07:28:02: wafer fragments in chamber Message-ID: Noticed several wafer pieces within processing chamber from previous user. Shutting down to protect vacuum system. From eenriquez at snf.stanford.edu Wed Oct 29 17:49:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Oct 2008 17:49:31 -0700 Subject: Shutdown stsetch SNF 2008-10-29 07:28:02: wafer fragments in chamber Message-ID: Cleaned the chamber. It looks like the user's wafer blew out during the etch. Ran a 60 minute O2 clean.