Shutdown stsetch SNF 2008-10-01 14:09:42: holder did not place center and inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 1 15:38:49 PDT 2008


Vented the chamber and recovered the carrier wafer.  Wipe down the platten and ran an O2 plasma.




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