Problem stsetch SNF 2008-10-12 14:19:46: broken wafer

takuyan at snf.stanford.edu takuyan at snf.stanford.edu
Sun Oct 12 14:19:47 PDT 2008

Previous message: Shutdown stsetch SNF 2008-10-01 14:09:42: holder did not place center and inside chamber
Next message: Problem stsetch SNF 2008-10-12 14:19:46: broken wafer
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I found a wafer is broken in the process chamber.
Elmer, could you tatke outside?
-Takuya

Previous message: Shutdown stsetch SNF 2008-10-01 14:09:42: holder did not place center and inside chamber
Next message: Problem stsetch SNF 2008-10-12 14:19:46: broken wafer
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list