Problem stsetch SNF 2008-10-21 18:17:30: broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 22 09:11:14 PDT 2008


Vented the chamber and removed the wafer pieces.  Wet cleaned the electrode and ran an O2 plasma.
The  wafer breakage was caused by a heavy coating of resist on the back of the wafer which caused the wafer to stick to the o-ring and ceramic ring.  




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