Problem stsetch SNF 2008-10-22 09:16:51: Ch. isolation valve leak

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 22 09:16:52 PDT 2008


We will replace the chamber iso valve o-ring during the holiday shutdown.  It will take about 4 days to perform the work because the chamber and the loadlock module will have to be separated in order to access the o-ring.




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