Comment stsetch SNF 2008-08-21 07:15:19: Update on isolation valve leak
latta at snf.stanford.edu
latta at snf.stanford.edu
Wed Oct 22 09:21:06 PDT 2008
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Problem stsetch SNF 2008-10-22 09:16:51: Ch. isolation valve leak
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Shutdown stsetch SNF 2008-10-22 12:46:26: wafer broke inside the chamber
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Problem stsetch SNF 2008-10-22 09:16:51: Ch. isolation valve leak
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Shutdown stsetch SNF 2008-10-22 12:46:26: wafer broke inside the chamber
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