Shutdown stsetch SNF 2008-10-27 19:41:15:

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 28 11:25:26 PDT 2008


Cleaned chamber.  It looks like the user's wafer just got too thin and blew out.  
Ran O2 clean and cycled wafers.




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