Problem stsetch SNF 2008-10-27 19:42:16: Wafer broken

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 28 11:25:34 PDT 2008

Previous message: Problem stsetch SNF 2008-10-27 19:42:16: Wafer broken
Next message: Shutdown stsetch SNF 2008-10-29 07:28:02: wafer fragments in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Cleaned chamber.  It looks like the user's wafer just got too thin and blew out.  
Ran O2 clean and cycled wafers.

Previous message: Problem stsetch SNF 2008-10-27 19:42:16: Wafer broken
Next message: Shutdown stsetch SNF 2008-10-29 07:28:02: wafer fragments in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list