Shutdown stsetch SNF 2008-10-29 07:28:02: wafer fragments in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 29 17:49:31 PDT 2008


Cleaned the chamber.  It looks like the user's wafer blew out during the etch.
Ran a 60 minute O2 clean. 




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