From eenriquez at snf.stanford.edu Tue Sep 2 09:15:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Sep 2008 09:15:57 -0700 Subject: Shutdown stsetch SNF 2008-08-29 15:34:58: Pump-out Time exceeded Message-ID: Restarted the turbo pump. Ran an O2 plasma for 30 min. Please remember to load a "phantom" wafer into the process chamber when placing the system on Standby. From srikantv at snf.stanford.edu Wed Sep 3 23:15:03 2008 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Wed, 3 Sep 2008 23:15:03 -0700 Subject: Shutdown stsetch SNF 2008-09-03 23:15:03: Loadlock won't pump Message-ID: Unable to open and load my wafer From cbaxter at snf.stanford.edu Wed Sep 3 23:51:31 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 3 Sep 2008 23:51:31 -0700 Subject: Shutdown stsetch SNF 2008-09-03 23:15:03: Loadlock won't pump Message-ID: Added white oil on load lock pump.. From cbaxter at snf.stanford.edu Sat Sep 6 13:25:33 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Sep 2008 13:25:33 -0700 Subject: Comment stsetch SNF 2008-09-06 13:25:32: Changed cda regulator. Message-ID: From eenriquez at snf.stanford.edu Wed Sep 10 09:08:08 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Sep 2008 09:08:08 -0700 Subject: Comment stsetch SNF 2008-09-06 13:25:32: Changed cda regulator. Message-ID: Archived From srikantv at snf.stanford.edu Wed Sep 10 09:41:35 2008 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Wed, 10 Sep 2008 09:41:35 -0700 Subject: Shutdown stsetch SNF 2008-09-10 09:41:35: Coil power out of tolerance Message-ID: no plasma From eenriquez at snf.stanford.edu Wed Sep 10 10:52:09 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Sep 2008 10:52:09 -0700 Subject: Shutdown stsetch SNF 2008-09-10 09:41:35: Coil power out of tolerance Message-ID: Changed the matching network preset values of the coil. Ran user's recipe with no problems. From news at discount-educational-software.net Thu Sep 11 16:01:28 2008 From: news at discount-educational-software.net (Education Software News) Date: Thu, 11 Sep 2008 19:01:28 -0400 Subject: Education Software News - September 2008 Message-ID: <44ca62f400cb1ccf6c8eb354eee15c@bmw> Back-to-School promotional price for Microsoft Office 2007 Professional available while supplies last! See details below. Adobe Acrobat Professional 9.0 has just been released along with updated versions of the Adobe Creative Suite bundles. See below for more details. Computer Products for Education is pleased to provide Academic Software News to current students, faculty, staff, and schools with news, pricing, and availability of Academic Edition Software from Microsoft, Adobe, Autodesk, Corel, Quark, FileMaker, EndNote and many other major software manufacturers. Please visit our website for more information: http://www.discount-educational-software.us or call 800-679-7007. 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Please call 800-679-7007 for more information. ---------------------- Education Standard You AVID Price Retail Save! ---------------------- --------- ------ ----- Avid Media Composer $294.95 $2495 88% Avid Xpress Pro 5.7 HD $289.95 $1695 83% Media Composer Studio $994.95 $3495 72% Pinnacle Liquid 7.2 $159.95 $999 84% http://www.discount-educational-software.us/avid.html For more information, visit our website at: http://www.discount-educational-software.us or call 800-679-7007. School purchase orders may be faxed to: 800-679-6996. Educational Software has the exact same features and functionality as Commercial Full-Versions of the software. Visit our website to view thousands of other items and accessories available from CPE at similar discounts. All software products from CPE are authentic original software from the manufacturer. These are not pirated software copies. All software comes in original manufacturer's packaging and contains a valid verifiable license. ------------------------- Volume Licensing: ------------------------- For volume licensing information for schools for quantities of five to ten (5-10) or more units of software, depending on the product(s), please call 800-679-7007 for more information. ---------------------------------------- Qualified Educational Buyers: ---------------------------------------- The following are defined as Qualified Education Buyers. Qualified Educational Buyers must provide the below verification upon making any purchase. 1. Students of Higher Education - All enrolled college, junior college, community college, technical school, vocational school, and university students. 2. K-12 Students - K-12 students are eligible for most, but not all, academic-edition software products. 3. Teachers - All K-12 school and Higher Education institution teachers. 4. K-12 school and Higher Education institution faculty. 5. Staff - All K-12 school and Higher Education institution staff. 6. Schools - All elementary, middle and high schools (K-12 schools); vocational and technical schools; correspondence schools, including Internet correspondence schools, and all colleges, including junior and community colleges, and universities. 7. Home Schools - Home schools are now eligible to purchase most Academic Edition software. Home schools must be approved on a case by case basis. Please call for more details. ------------------------- Verification: ------------------------- Purchasers must provide fax-verification of status as being a current faculty, staff, or student. After placing your order, you simply fax to CPE either: (a) a copy of a current picture School I.D. Card; or, (b) a current paycheck stub with an alternative picture I.D. (drivers license, etc.) Sensitive information may be blacked out; or (c) Schools may purchase by faxing a valid school purchase order. For more details, call us or visit our website. ------------------------- CPE is an Authorized Education Reseller for Microsoft, Adobe, Macromedia, AutoDesk, Corel, Sony, Avid, Pinnacle, Symantec and many other major software manufacturers. CPE is a national software distributor committed to providing the best prices and the best customer service to the Education Community!! Prices generally remain unchanged until the end of the month. However, all prices and availability are subject to change without notice, due to factors outside our control. __________________________ We hope you have found this message valuable. However, if you do not wish to receive any more newsletters from CPE, please use the following link: http://www.discount-educational-software.us/rem.asp?a=remv&e=stsetch-pcs at snf.stanford.edu Or call 800-679-7007 for additional options. __________________________ Sincerely, Computer Products for Education 5325 140th Avenue North Clearwater, Florida 33760 Tel: 800-679-7007 Fax: 800-679-6996 newsletter at discount-educational-software.us ___________________ THANK YOU!!! From srikantv at snf.stanford.edu Sat Sep 13 12:33:47 2008 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Sat, 13 Sep 2008 12:33:47 -0700 Subject: Shutdown stsetch SNF 2008-09-13 12:33:44: load lock pump not pumping Message-ID: The load lock pump is not pumping air. Unable to load wafer. A strong gas smell when the loading door is open. From eenriquez at snf.stanford.edu Mon Sep 15 08:59:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Sep 2008 08:59:11 -0700 Subject: Shutdown stsetch SNF 2008-09-13 12:33:44: load lock pump not pumping Message-ID: Found the pump breaker behind the system was turned off (not tripped). Ran O2 plasma for 15 minutes with no problems. From ericp at snf.stanford.edu Thu Sep 18 00:50:14 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 18 Sep 2008 00:50:14 -0700 Subject: Shutdown stsetch SNF 2008-09-18 00:50:13: loadlock won't pump Message-ID: Maybe it's out of oil again (for the second time in a week, and the third time this month), which might indicate an actual problem with the pump. From mdickey at snf.stanford.edu Thu Sep 18 08:10:57 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 18 Sep 2008 08:10:57 -0700 Subject: Comment stsetch SNF 2008-09-18 08:10:56: Loadlock pump Message-ID: Oil level is fine, what you talking about lewis? From eenriquez at snf.stanford.edu Thu Sep 18 14:05:16 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Sep 2008 14:05:16 -0700 Subject: Shutdown stsetch SNF 2008-09-18 00:50:13: loadlock won't pump Message-ID: Cycled the loadlock many times without a failure. The loadlock however pumps a little slower than normal and the pump oil is discolored. A newly rebuilt pump should be here next Tuesday. We will replace the pump by next Wed. From eenriquez at snf.stanford.edu Thu Sep 18 14:07:01 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Sep 2008 14:07:01 -0700 Subject: Problem stsetch SNF 2008-09-18 14:07:01: Loadlock pumping down slowly Message-ID: Will replace the pump by next Wed. From eenriquez at snf.stanford.edu Fri Sep 19 07:30:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Sep 2008 07:30:04 -0700 Subject: Comment stsetch SNF 2008-09-18 08:10:56: Loadlock pump Message-ID: Archived From mtan at snf.stanford.edu Mon Sep 22 10:09:28 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 22 Sep 2008 10:09:28 -0700 Subject: Shutdown stsetch SNF 2008-09-22 10:09:27: excessive pump down time Message-ID: I found that the machine was left in an undefined state with an excessive pump down time error. I tried to use it but nothing worked. Cszar asked me to shut it down. From eenriquez at snf.stanford.edu Mon Sep 22 14:45:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Sep 2008 14:45:06 -0700 Subject: Comment stsetch SNF 2008-09-22 14:45:05: Update LL pump Message-ID: Will try to replace tomorrow. Old pump has been disconnected from the system. From eenriquez at snf.stanford.edu Tue Sep 23 11:19:10 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Sep 2008 11:19:10 -0700 Subject: Problem stsetch SNF 2008-09-18 14:07:01: Loadlock pumping down slowly Message-ID: Mike replaced the loadlock pump (now using fomblin oil). Cycled the loadlock many times with no problems. It took about 1 minute for the LL to pump to transfer pressure and also 1 minute to vent. Ran a 15 minute O2 plasma. From eenriquez at snf.stanford.edu Tue Sep 23 11:19:20 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Sep 2008 11:19:20 -0700 Subject: Shutdown stsetch SNF 2008-09-22 10:09:27: excessive pump down time Message-ID: Mike replaced the loadlock pump (now using fomblin oil). Cycled the loadlock many times with no problems. It took about 1 minute for the LL to pump to transfer pressure and also 1 minute to vent. Ran a 15 minute O2 plasma. From eenriquez at snf.stanford.edu Tue Sep 23 11:19:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Sep 2008 11:19:35 -0700 Subject: Comment stsetch SNF 2008-09-22 14:45:05: Update LL pump Message-ID: Archived From latta at snf.stanford.edu Tue Sep 23 16:14:38 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 23 Sep 2008 16:14:38 -0700 Subject: Comment stsetch SNF 2008-09-23 16:14:38: Sept process quals Message-ID: DEEP program for 00:10:00 Si etch rate = 2.69u/min PR etch rate = 235A/min Si : PR = 114.5 : 1 From matejen at snf.stanford.edu Sun Sep 28 23:31:32 2008 From: matejen at snf.stanford.edu (matejen at snf.stanford.edu) Date: Sun, 28 Sep 2008 23:31:32 -0700 Subject: Shutdown stsetch SNF 2008-09-28 23:31:32: wafer cracked inside chamber Message-ID: My wafer is cracked inside chamber during processing. It needs to be cleaned up before next run. From eenriquez at snf.stanford.edu Mon Sep 29 10:02:54 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Sep 2008 10:02:54 -0700 Subject: Shutdown stsetch SNF 2008-09-28 23:31:32: wafer cracked inside chamber Message-ID: Recovered the user's wafer and placed in his wafer box. The process etched through the wafer and left hole patterns on the electrode. Ran O2 clean