Shutdown stsetch SNF 2008-08-29 15:34:58: Pump-out Time exceeded

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Sep 2 09:15:57 PDT 2008


Restarted the turbo pump.  Ran an O2 plasma for 30 min.
Please remember to load a "phantom" wafer into the process chamber when placing the system on Standby.




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