Shutdown stsetch SNF 2008-09-13 12:33:44: load lock pump not pumping

srikantv at snf.stanford.edu srikantv at snf.stanford.edu
Sat Sep 13 12:33:47 PDT 2008


The load lock pump is not pumping air. Unable to load wafer.  A strong gas smell when the loading door is open.




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