Problem stsetch SNF 2008-09-18 14:07:01: Loadlock pumping down slowly

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Sep 23 11:19:10 PDT 2008


Mike replaced the loadlock pump (now using fomblin oil).  Cycled the loadlock many times with no problems.  It took about 1 minute for the LL to pump to transfer pressure and also 1 minute to vent.  Ran a 15 minute O2 plasma.




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