Comment stsetch SNF 2008-09-23 16:14:38: Sept process quals

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Sep 23 16:14:38 PDT 2008


DEEP program for 00:10:00
Si etch rate = 2.69u/min
PR etch rate = 235A/min
Si : PR = 114.5 : 1




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