Shutdown stsetch SNF 2008-09-28 23:31:32: wafer cracked inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 29 10:02:54 PDT 2008


Recovered the user's wafer and placed in his wafer box.  The process etched through the wafer and left hole patterns on the electrode.  Ran O2 clean




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