Shutdown stsetch SNF 2009-04-14 09:26:57: Two Top Rings in Syst

emyers at snf.stanford.edu emyers at snf.stanford.edu
Tue Apr 14 09:26:58 PDT 2009


There are two wafer holder top rings in the system.  One on top of the wafer and one trapped under the wafer.  I think the chamber will need to be opened to collect the rings and wafes.




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