Shutdown stsetch SNF 2009-04-14 09:26:57: Two Top Rings in Syst

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Apr 14 18:08:39 PDT 2009


Vented chamber and removed wafer carrier and wafer, also
changed lower chamber o-ring. Run 30 mins o2 clean.




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