Problem stsetch SNF 2009-04-15 22:48:11: Silicon shards on the chuck

malekos at snf.stanford.edu malekos at snf.stanford.edu
Wed Apr 15 22:48:11 PDT 2009


As I struck a plasma, I noticed my wafer resting on some silicon shards.  I stopped my etch and removed my wafer.  




More information about the stsetch-pcs mailing list