Problem stsetch SNF 2009-04-15 22:48:11: Silicon shards on the chuck
malekos at snf.stanford.edu
malekos at snf.stanford.edu
Wed Apr 15 22:48:11 PDT 2009
As I struck a plasma, I noticed my wafer resting on some silicon shards. I stopped my etch and removed my wafer.
More information about the stsetch-pcs
mailing list