Shutdown stsetch SNF 2009-04-20 15:47:26: Wafer in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Apr 21 10:26:24 PDT 2009


Removed wafer from the chamber.  Cycled wafer 10 x with no problems.
The user ran the upside down.  Its possible that the resist stuck to the helium seal and popped off during the unload ??.  
Ran a 25 min O2 clean.




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