From quickwin at snf.stanford.edu Sat Aug 8 15:35:24 2009 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Sat, 8 Aug 2009 15:35:24 -0700 Subject: Problem stsetch SNF 2009-08-08 15:35:23: bad etch Message-ID: I used my regular DEEP to etch through the wafer. The wafer came out totally charred. I noticed that the backside pressure fluctrated from 9.80 to 9.96, which is probably due to teflon buildup on the wafer o-ring. But this is not the reason for my bad etch. Something is not right with this machine! From latta at snf.stanford.edu Tue Aug 11 13:37:25 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Aug 2009 13:37:25 -0700 Subject: Shutdown stsetch SNF 2009-08-11 13:37:25: Big slice of wf on lip seal Message-ID: Not sure how long it has been there, but it may explain some of the rapid PR and ox etching.... From cbaxter at snf.stanford.edu Tue Aug 11 20:40:51 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 11 Aug 2009 20:40:51 -0700 Subject: Shutdown stsetch SNF 2009-08-11 13:37:25: Big slice of wf on lip seal Message-ID: Vented chamber and removed wafer chip, wiped down chamber with ipa and water. Run 30 mins o2 plasma. From quickwin at snf.stanford.edu Thu Aug 13 10:51:43 2009 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Thu, 13 Aug 2009 10:51:43 -0700 Subject: Problem stsetch SNF 2009-08-13 10:51:43: bad etch again Message-ID: Nancy Latta said that a large chunk of wafer was retrieved from the chamber which might be responsible for my previous bad etch. So I tried again. This time, I watched it throughout the etch. Mask erosion occurred quickly and wafer color was dark, which are both abnormal. I had to stop the etch 20 minutes before the normal finish time. This wafer is bad again. I think this machine requires thorough cleaning and checking for leaks. From bchui at snf.stanford.edu Sat Aug 22 18:24:04 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 22 Aug 2009 18:24:04 -0700 Subject: Problem stsetch SNF 2009-08-22 18:24:04: Plasma flickering a lot during passivation Message-ID: Plasma flickering a lot during passivation (I'm using DEEP but I think it's true for other recipes as well.)