Shutdown stsetch SNF 2009-08-11 13:37:25: Big slice of wf on lip seal

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Aug 11 20:40:51 PDT 2009


Vented chamber and removed wafer chip, wiped down 
chamber with ipa and water. Run 30 mins o2 plasma.




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