Problem stsetch SNF 2009-12-01 10:39:19: Another missing die in chamber

fried at snf.stanford.edu fried at snf.stanford.edu
Tue Dec 1 10:39:19 PST 2009


Tried monitoring final minutes of etch until reaching BOX layer, but even before most of the wafer was completely etched one of the dies on the perimer popped out.  It must be somewhere in the chamber... Sorry again.  




More information about the stsetch-pcs mailing list