Problem stsetch SNF 2009-12-01 10:39:19: Another missing die in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Dec 1 14:52:37 PST 2009

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Missing die is not on the processing area.  Ran Deep recipe, cooling He flow is normal (2.4 sccm).

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