From eenriquez at snf.stanford.edu Tue Jan 6 08:49:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Jan 2009 08:49:57 -0800 Subject: Shutdown stsetch SNF 2008-12-18 07:54:14: Facilities electrical work Message-ID: Completed electrical work. From eenriquez at snf.stanford.edu Tue Jan 6 08:55:28 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Jan 2009 08:55:28 -0800 Subject: Comment stsetch SNF 2008-11-18 18:28:20: Another data point Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jan 6 08:55:41 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Jan 2009 08:55:41 -0800 Subject: Comment stsetch SNF 2008-11-19 16:46:36: A third data point Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jan 6 08:55:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Jan 2009 08:55:51 -0800 Subject: Comment stsetch SNF 2008-11-18 16:57:31: Quals after Turbo Replacement Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jan 6 08:58:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Jan 2009 08:58:34 -0800 Subject: Comment stsetch SNF 2009-01-06 08:58:33: New turbo installed Message-ID: Installed new turbo during the shutdown. From gyama at snf.stanford.edu Tue Jan 6 09:41:48 2009 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 6 Jan 2009 09:41:48 -0800 Subject: Shutdown stsetch SNF 2009-01-06 09:41:48: turbo pump fail Message-ID: From eenriquez at snf.stanford.edu Tue Jan 6 14:21:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Jan 2009 14:21:10 -0800 Subject: Comment stsetch SNF 2009-01-06 14:21:09: Bad turbo controller Message-ID: New turbo controller will be here by noon tomorrow. From eenriquez at snf.stanford.edu Thu Jan 8 14:40:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Jan 2009 14:40:13 -0800 Subject: Comment stsetch SNF 2009-01-06 14:21:09: Bad turbo controller Message-ID: It turns out that the new pump we just purchased was defective. Installed a newly rebuilt turbo and now running an O2 clean. I will run the turbo overnight and if everything is OK, I will release the tool at 9 am. From eenriquez at snf.stanford.edu Thu Jan 8 14:40:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Jan 2009 14:40:40 -0800 Subject: Comment stsetch SNF 2009-01-08 14:40:40: Update Message-ID: Installed a newly rebuilt turbo and now running an O2 clean. I will run the turbo overnight and if everything is OK, I will release the tool at 9 am. From eenriquez at snf.stanford.edu Fri Jan 9 09:04:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Jan 2009 09:04:49 -0800 Subject: Shutdown stsetch SNF 2009-01-06 09:41:48: turbo pump fail Message-ID: Installed new turbo pump. Ran the Deep recipe for 35 min, ran O2 plasma for 20 min with no problems. Turbo pump baseline- With 100 sccm SF6 flow and throttle valve full open: press= 7.5 mT , turbo current = 5.55 A. The plan is to check the baseline on a daily basis so that we can monitor the health of the turbo. From eenriquez at snf.stanford.edu Fri Jan 9 09:05:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Jan 2009 09:05:13 -0800 Subject: Comment stsetch SNF 2009-01-08 14:40:40: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jan 9 09:05:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Jan 2009 09:05:52 -0800 Subject: Comment stsetch SNF 2009-01-06 08:58:33: New turbo installed Message-ID: This turbo was returned to vendor. From eenriquez at snf.stanford.edu Fri Jan 9 09:06:56 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Jan 2009 09:06:56 -0800 Subject: Comment stsetch SNF 2009-01-09 09:06:55: New turbo installed Message-ID: From wpeng at snf.stanford.edu Tue Jan 27 11:28:54 2009 From: wpeng at snf.stanford.edu (wpeng at snf.stanford.edu) Date: Tue, 27 Jan 2009 11:28:54 -0800 Subject: Shutdown stsetch SNF 2009-01-27 11:28:54: compressed air failed Message-ID: the process stoped due to compressed air fail. the wafer is still good (not broken). From eenriquez at snf.stanford.edu Tue Jan 27 12:02:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Jan 2009 12:02:18 -0800 Subject: Shutdown stsetch SNF 2009-01-27 11:28:54: compressed air failed Message-ID: Compressed air is OK now. Processed a wafer with no problems. The user's wafer etched for 31 min, 47 sec before the processed stopped due to the compressed air fault. From eenriquez at snf.stanford.edu Wed Jan 28 13:02:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Jan 2009 13:02:30 -0800 Subject: Comment stsetch SNF 2009-01-09 09:06:55: New turbo installed Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 28 13:04:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Jan 2009 13:04:49 -0800 Subject: Comment stsetch SNF 2009-01-28 13:04:48: Installed new turbo Message-ID: Installed a more robust turbo. Ran O2 plasma for 1 hour with no problems. From kwankyu at snf.stanford.edu Fri Jan 30 03:26:23 2009 From: kwankyu at snf.stanford.edu (kwankyu at snf.stanford.edu) Date: Fri, 30 Jan 2009 03:26:23 -0800 Subject: Problem stsetch SNF 2009-01-30 03:26:22: Compressed air fault Message-ID: After 12min of DEEP process, process stopped with error message "compressed air fault". From eenriquez at snf.stanford.edu Fri Jan 30 08:22:42 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Jan 2009 08:22:42 -0800 Subject: Problem stsetch SNF 2009-01-30 03:26:22: Compressed air fault Message-ID: Unable to repeat the problem. The compressed air fault occurs when the facilities CDA line pressure drops. Perhaps there was a dip in line pressure this morning. I will check our data logger.