Problem stsetch SNF 2009-07-23 17:22:10: Stuck in "pumping down" step

bchui at snf.stanford.edu bchui at snf.stanford.edu
Thu Jul 23 17:22:10 PDT 2009


Can't process wafer... system freezes in "pumping down" step as soon as I click "process."  (Needs system reset or more major fix?)




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