Shutdown stsetch SNF 2009-05-31 15:39:39: Interlock tripped error

eenriquez at eenriquez at
Mon Jun 1 11:30:30 PDT 2009

Recovered the user's wafer.  Unable to duplicate the problem.  I believe that it was cause by a high He leak rate.  Please make a note of the He flow rate next time the problem reoccurs.  The typical flow is about 2.4 sccm.

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