Problem stsetch SNF 2009-05-30 01:18:58: Interlock tripped error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 1 11:30:41 PDT 2009


Recovered the user's wafer.  Unable to duplicate the problem.  I believe that it was cause by a high He leak rate.  Please make a note of the He flow rate next time the problem reoccurs.  The typical flow is about 2.4 sccm.




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