Problem stsetch SNF 2009-06-01 15:08:51: machine froze
ginel at snf.stanford.edu
ginel at snf.stanford.edu
Mon Jun 1 15:08:52 PDT 2009
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Problem stsetch SNF 2009-05-30 01:18:58: Interlock tripped error
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Problem stsetch SNF 2009-06-01 15:08:51: machine froze
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lost communication with ICP... my wafer is inside.
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Problem stsetch SNF 2009-05-30 01:18:58: Interlock tripped error
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Problem stsetch SNF 2009-06-01 15:08:51: machine froze
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