Comment stsetch SNF 2009-05-26 03:24:20: Re: SF6 adjustment

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jun 2 14:43:16 PDT 2009


Replaced the SF6 MFC.  Now the flow is correct.  The flow however is unstable above 140 sccm.  Will order another MFC.




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