Comment stsetch SNF 2009-06-02 16:50:28: MFC Replaced -

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Jun 2 16:50:28 PDT 2009


Here's Elmer's message from this afternoon (reposted, to make it more visible):
Replaced the SF6 MFC.  Now the flow is correct.  The flow however is unstable above 140 sccm.  Will order another MFC.




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