Comment stsetch SNF 2009-06-02 16:50:28: MFC Replaced -

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Jun 2 16:50:28 PDT 2009

Previous message: Comment stsetch SNF 2009-05-26 03:24:20: Re: SF6 adjustment
Next message: Problem stsetch SNF 2009-06-03 13:50:45: reflected power is too high
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Here's Elmer's message from this afternoon (reposted, to make it more visible):
Replaced the SF6 MFC.  Now the flow is correct.  The flow however is unstable above 140 sccm.  Will order another MFC.

Previous message: Comment stsetch SNF 2009-05-26 03:24:20: Re: SF6 adjustment
Next message: Problem stsetch SNF 2009-06-03 13:50:45: reflected power is too high
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list