Comment stsetch SNF 2009-06-06 18:02:01: DEEP recipe coil reflected power high

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Sat Jun 6 18:02:01 PDT 2009


i did several long (1hour) etches with DEEP today and for each the coil reflected power was really high (>100W) for the first 5-15 minutes then quickly reduced to a few W.  i actually got great results (new mfc shows significant grass reduction and etch rate > 2.5um/min), but this could affect users running DEEP for shorter times.  other users is the reflected power initially high on other recipes?




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