Shutdown stsetch SNF 2009-06-18 16:17:18: wafer broke in chamber
till at snf.stanford.edu
till at snf.stanford.edu
Thu Jun 18 16:17:18 PDT 2009
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Comment stsetch SNF 2009-06-12 17:19:22: grassing solved, selectivity improved, after MFC change
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Shutdown stsetch SNF 2009-06-18 16:17:18: wafer broke in chamber
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Needs to be opened.
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Comment stsetch SNF 2009-06-12 17:19:22: grassing solved, selectivity improved, after MFC change
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Shutdown stsetch SNF 2009-06-18 16:17:18: wafer broke in chamber
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