Comment stsetch SNF 2009-06-22 09:10:50: wafer piece in the chamber

xzhuan1 at snf.stanford.edu xzhuan1 at snf.stanford.edu
Mon Jun 22 09:10:50 PDT 2009


The wafer from the previous user broke up in the chamber, and there's some pieces remain in the chamber that need to be taken out by the staff.




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