Problem stsetch SNF 2009-06-29 16:20:29: ICP transfer mode failure

elvislin at snf.stanford.edu elvislin at snf.stanford.edu
Mon Jun 29 16:20:29 PDT 2009


after the issue of idling, I loaded in one prime wafer for the test to see if the machine can come back from idling as yesterday.  Then STS shows "serial communication failure" and then "transfer mode entry failure".  Now my prime test wafer is still in the chamber.




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