June 2009 Archives by date

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Starting: Mon Jun 1 11:30:30 PDT 2009
Ending: Mon Jun 29 16:20:29 PDT 2009
Messages: 35

• Shutdown stsetch SNF 2009-05-31 15:39:39: Interlock tripped error   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-05-30 01:18:58: Interlock tripped error   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-06-01 15:08:51: machine froze   ginel at snf.stanford.edu
• Shutdown stsetch SNF 2009-06-01 18:09:32:   ginel at snf.stanford.edu
• Problem stsetch SNF 2009-06-01 15:08:51: machine froze   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2009-06-01 18:09:32:   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-05-19 17:08:35: Wafer fragment inside chamber   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-05-20 18:50:45: SF6 flow check   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-05-26 03:24:20: Re: SF6 adjustment   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-06-02 16:50:28: MFC Replaced -   mtang at snf.stanford.edu
• Problem stsetch SNF 2009-06-03 13:50:45: reflected power is too high   till at snf.stanford.edu
• Comment stsetch SNF 2009-06-06 18:02:01: DEEP recipe coil reflected power high   jprovine at snf.stanford.edu
• Comment stsetch SNF 2009-06-07 13:40:08: high reflected coil power on other recipes   jprovine at snf.stanford.edu
• Comment stsetch SNF 2009-06-12 17:19:22: grassing solved, selectivity improved, after MFC change   jwpchen at snf.stanford.edu
• Shutdown stsetch SNF 2009-06-18 16:17:18: wafer broke in chamber   till at snf.stanford.edu
• Shutdown stsetch SNF 2009-06-18 16:17:18: wafer broke in chamber   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2009-06-18 20:14:30:   xzhuan1 at snf.stanford.edu
• Shutdown stsetch SNF 2009-06-18 20:14:30:   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2009-05-17 09:34:52: chamber may need cleaning   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2009-06-03 13:50:45: reflected power is too high   cbaxter at snf.stanford.edu
• Comment stsetch SNF 2009-06-22 09:10:50: wafer piece in the chamber   xzhuan1 at snf.stanford.edu
• Shutdown stsetch SNF 2009-06-22 09:42:49: Cleaning the electrode   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2009-06-22 09:42:49: Cleaning the electrode   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-06-22 09:10:50: wafer piece in the chamber   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-06-24 17:50:09: wafer not centered   till at snf.stanford.edu
• Problem stsetch SNF 2009-05-12 15:32:41: SF6 flow questionable   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-05-17 20:19:59: broken wafer cleared, fixed lifter pin problem   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-05-19 18:31:16: Fragment retrieved   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-05-21 09:38:18: reducing SF6 flow did not work   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2009-05-14 13:26:09: SF6 flow update   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2009-06-26 03:43:50: wafer centering issues worse   damodei at snf.stanford.edu
• Problem stsetch SNF 2009-06-28 16:38:20: idle at "stand by - pump out" step without continuing the following processing step   elvislin at snf.stanford.edu
• Comment stsetch SNF 2009-06-28 20:49:56: Machine working OK   damodei at snf.stanford.edu
• Problem stsetch SNF 2009-06-29 15:03:23: again, it idle at "pumping out" step   elvislin at snf.stanford.edu
• Problem stsetch SNF 2009-06-29 16:20:29: ICP transfer mode failure   elvislin at snf.stanford.edu

Last message date: Mon Jun 29 16:20:29 PDT 2009
Archived on: Fri Jan 11 13:11:22 PST 2013

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