From eenriquez at snf.stanford.edu Tue Mar 10 15:21:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Mar 2009 15:21:54 -0700 Subject: Comment stsetch SNF 2009-03-10 15:21:54: Maintenance activity Message-ID: User broke a wafer in the chamber. Vented chamber and recovered the wafer. Wiped down the chuck and ran an O2 clean. From eenriquez at snf.stanford.edu Fri Mar 13 07:25:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Mar 2009 07:25:18 -0700 Subject: Comment stsetch SNF 2009-03-10 15:21:54: Maintenance activity Message-ID: Archived From eenriquez at snf.stanford.edu Fri Mar 13 07:25:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Mar 2009 07:25:26 -0700 Subject: Comment stsetch SNF 2009-01-28 13:04:48: Installed new turbo Message-ID: Archived From eenriquez at snf.stanford.edu Fri Mar 13 07:25:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Mar 2009 07:25:35 -0700 Subject: Comment stsetch SNF 2009-02-12 11:49:35: Installed turbo heater Message-ID: Archived From eenriquez at snf.stanford.edu Fri Mar 13 10:09:58 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Mar 2009 10:09:58 -0700 Subject: Comment stsetch SNF 2009-03-13 10:09:57: Adjusted backside He flow Message-ID: Backside He flow was too low ( 0.17 sccm @ 9 Torr). Adjusted flow back up to spec ( 2.8 sccm @ 9 Torr). From elvislin at snf.stanford.edu Mon Mar 16 19:38:08 2009 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Mon, 16 Mar 2009 19:38:08 -0700 Subject: Problem stsetch SNF 2009-03-16 19:38:07: platen power out of tolerence Message-ID: the machine stop in the middle of processing. the error message shows " icp holding process DEEP on #### while Platen power out of tolerence". Even I resume the process, it seems etch nothing on my wafer. From cbaxter at snf.stanford.edu Mon Mar 16 22:13:54 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Mar 2009 22:13:54 -0700 Subject: Problem stsetch SNF 2009-03-16 19:38:07: platen power out of tolerence Message-ID: Run o2 plasma, w/out problem... From huigensr at snf.stanford.edu Tue Mar 17 10:44:57 2009 From: huigensr at snf.stanford.edu (huigensr at snf.stanford.edu) Date: Tue, 17 Mar 2009 10:44:57 -0700 Subject: Problem stsetch SNF 2009-03-17 10:44:56: platen power error Message-ID: Running DEEP recipe - platen power drops to zero, ending program. Has occured 6x in 15minutes...have to abandon etch. From eenriquez at snf.stanford.edu Tue Mar 17 12:51:36 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Mar 2009 12:51:36 -0700 Subject: Problem stsetch SNF 2009-03-17 10:44:56: platen power error Message-ID: Found a cable was unplug at the back of the 30W RF generator. From huigensr at snf.stanford.edu Wed Mar 18 20:07:03 2009 From: huigensr at snf.stanford.edu (huigensr at snf.stanford.edu) Date: Wed, 18 Mar 2009 20:07:03 -0700 Subject: Problem stsetch SNF 2009-03-18 20:07:02: Grass, grass, grass... Message-ID: Standard DEEP recipe is showing heavy grassing in open areas. He flow appears to be low (approx. 0.5 sccm with a 10torr pressure), and resist is sometimes burning. ...something is very wrong... From cbaxter at snf.stanford.edu Wed Mar 18 22:44:17 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Mar 2009 22:44:17 -0700 Subject: Problem stsetch SNF 2009-03-18 20:07:02: Grass, grass, grass... Message-ID: Suspect liquid on the line, pumped out and set low pressure From eenriquez at snf.stanford.edu Thu Mar 19 09:36:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Mar 2009 09:36:27 -0700 Subject: Shutdown stsetch SNF 2009-03-19 09:36:27: Backside He flow problem Message-ID: He cooling flow is too low. From eenriquez at snf.stanford.edu Thu Mar 19 11:26:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Mar 2009 11:26:22 -0700 Subject: Problem stsetch SNF 2009-03-19 11:26:21: Heavy grassing Message-ID: Users are seeing heavy grassing on their wafer especially with the DEEP recipe. From eenriquez at snf.stanford.edu Thu Mar 19 15:17:56 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Mar 2009 15:17:56 -0700 Subject: Comment stsetch SNF 2009-03-19 15:17:56: Update Message-ID: Backside He flow is inconsistent. It changes whenever the chuck is cycled up and down. Possible bad helium nupro valve. C4F8 flow seems to be too high (2x) when compared to historical test pressure values. With the throttle valve fully open and the C4F8 ( max 175 sccm) = 50 sccm the pressure was 1.6 mT. Now pressure = 2.7 mT. If I drop the flow to 25 sccm, the pressure decreases to 1.6 mT. I will run more test tomorrow but we might have to send the MFC out for recalibration. From huigensr at snf.stanford.edu Fri Mar 20 07:40:18 2009 From: huigensr at snf.stanford.edu (huigensr at snf.stanford.edu) Date: Fri, 20 Mar 2009 07:40:18 -0700 Subject: Comment stsetch SNF 2009-03-20 07:40:17: Message-ID: From huigensr at snf.stanford.edu Fri Mar 20 10:21:56 2009 From: huigensr at snf.stanford.edu (huigensr at snf.stanford.edu) Date: Fri, 20 Mar 2009 10:21:56 -0700 Subject: Problem stsetch SNF 2009-03-20 10:21:55: Update: Ran some wafers Message-ID: (please excuse spelling errors)It was noticed on Wednesday night by other users that some C4F8 may have condensed in the lines. The lines were then pumped for 1hr to hopefully remove the excess polymer. Subsequent wafers have shown a reasonable improvement in grass (less present), but grass still exists. The problem isn't fixed, but Elmer/Cesar seem to be on the right track. Elmer reports an above average C4F8 pressure on a calibration test, and the He flow continues to drop from the 2.8sccm set point with every wafer prossesed; each wafer loaded onto the chuck seems to adjust the He flow approx. 0.15sccm. On thursday night, the He flow was 2.3...now, after 6 wafers, the flow is 1.25 and dropping. From eenriquez at snf.stanford.edu Fri Mar 20 15:13:03 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Mar 2009 15:13:03 -0700 Subject: Shutdown stsetch SNF 2009-03-19 09:36:27: Backside He flow problem Message-ID: Problem; Inconsistent backside He flow and unreliable C4F8 flow. Plan: Repair the defective He shutoff valve and replace the C4F8 flow controller on Monday. Please verify your process before committing your actual device. From eenriquez at snf.stanford.edu Mon Mar 23 07:51:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Mar 2009 07:51:21 -0700 Subject: Shutdown stsetch SNF 2009-03-23 07:51:21: Replacing C4F8 MFC Message-ID: Also installing a metering valve in the He cooling line From eenriquez at snf.stanford.edu Mon Mar 23 14:32:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:32:51 -0700 Subject: Shutdown stsetch SNF 2009-03-23 07:51:21: Replacing C4F8 MFC Message-ID: Installed new C4F8 mfc. Also installed a metering valve in the He cooling line. Ran O2 plasma and DEEP recipe for 1 hour with no problems. Please qualify your process before committing your actual device. From eenriquez at snf.stanford.edu Mon Mar 23 14:33:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:33:10 -0700 Subject: Comment stsetch SNF 2009-03-19 15:17:56: Update Message-ID: Archive From eenriquez at snf.stanford.edu Mon Mar 23 14:33:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:33:21 -0700 Subject: Problem stsetch SNF 2009-03-19 11:26:21: Heavy grassing Message-ID: Archive From eenriquez at snf.stanford.edu Mon Mar 23 14:33:42 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:33:42 -0700 Subject: Comment stsetch SNF 2009-03-13 10:09:57: Adjusted backside He flow Message-ID: Archived From eenriquez at snf.stanford.edu Mon Mar 23 14:33:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:33:54 -0700 Subject: Comment stsetch SNF 2009-03-20 07:40:17: Message-ID: From eenriquez at snf.stanford.edu Mon Mar 23 14:34:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:34:52 -0700 Subject: Comment stsetch SNF 2009-03-23 14:34:51: C4F8 mfc and He metering valve installed Message-ID: Please qualify your process before committing your actual device. From eenriquez at snf.stanford.edu Wed Mar 25 09:05:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Mar 2009 09:05:32 -0700 Subject: Comment stsetch SNF 2009-03-25 09:05:31: Maintenance check Message-ID: Ran Deep recipe: pressure range as it cycled between etch/dep: 18 - 40 mT Cooling He flow : 2.41 sccm From eenriquez at snf.stanford.edu Wed Mar 25 09:05:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Mar 2009 09:05:55 -0700 Subject: Comment stsetch SNF 2009-03-25 09:05:31: Maintenance check Message-ID: Archived From eenriquez at snf.stanford.edu Mon Mar 30 10:19:46 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Mar 2009 10:19:46 -0700 Subject: Comment stsetch SNF 2009-03-23 14:34:51: C4F8 mfc and He metering valve installed Message-ID: Archived From eenriquez at snf.stanford.edu Mon Mar 30 10:19:59 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Mar 2009 10:19:59 -0700 Subject: Problem stsetch SNF 2009-03-20 10:21:55: Update: Ran some wafers Message-ID: C4F8 mfc and He metering valve installed. From eenriquez at snf.stanford.edu Mon Mar 30 10:33:06 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Mar 2009 10:33:06 -0700 Subject: Comment stsetch SNF 2009-03-30 10:33:06: Maintenance check Message-ID: Ran Deep recipe: pressure range as it cycled between etch/dep: 18 - 40 mT Cooling He flow : 2.39 sccm From eenriquez at snf.stanford.edu Mon Mar 30 10:33:19 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Mar 2009 10:33:19 -0700 Subject: Comment stsetch SNF 2009-03-30 10:33:06: Maintenance check Message-ID: Archived