Comment stsetch SNF 2009-03-10 15:21:54: Maintenance activity
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Mar 10 15:21:54 PDT 2009
User broke a wafer in the chamber. Vented chamber and recovered the wafer. Wiped down the chuck and ran an O2 clean.
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