Comment stsetch SNF 2009-03-10 15:21:54: Maintenance activity

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 10 15:21:54 PDT 2009


User broke a wafer in the chamber.  Vented chamber and recovered the wafer.  Wiped down the chuck and ran an O2 clean.




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