Comment stsetch SNF 2009-03-13 10:09:57: Adjusted backside He flow

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Mar 13 10:09:58 PDT 2009


Backside He flow was too low ( 0.17 sccm @ 9 Torr).  Adjusted flow back up to spec ( 2.8 sccm @ 9 Torr).




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