Problem stsetch SNF 2009-03-16 19:38:07: platen power out of tolerence

elvislin at snf.stanford.edu elvislin at snf.stanford.edu
Mon Mar 16 19:38:08 PDT 2009


the machine stop in the middle of processing.  the error message shows " icp holding process DEEP on #### while Platen power out of tolerence".  Even I resume the process, it seems etch nothing on my wafer.




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