Problem stsetch SNF 2009-03-16 19:38:07: platen power out of tolerence

elvislin at snf.stanford.edu elvislin at snf.stanford.edu
Mon Mar 16 19:38:08 PDT 2009

Previous message: Comment stsetch SNF 2009-03-13 10:09:57: Adjusted backside He flow
Next message: Problem stsetch SNF 2009-03-16 19:38:07: platen power out of tolerence
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

the machine stop in the middle of processing.  the error message shows " icp holding process DEEP on #### while Platen power out of tolerence".  Even I resume the process, it seems etch nothing on my wafer.

Previous message: Comment stsetch SNF 2009-03-13 10:09:57: Adjusted backside He flow
Next message: Problem stsetch SNF 2009-03-16 19:38:07: platen power out of tolerence
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list