Problem stsetch SNF 2009-03-17 10:44:56: platen power error

huigensr at snf.stanford.edu huigensr at snf.stanford.edu
Tue Mar 17 10:44:57 PDT 2009

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Running DEEP recipe - platen power drops to zero, ending program. Has occured 6x in 15minutes...have to abandon etch.

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