Problem stsetch SNF 2009-03-18 20:07:02: Grass, grass, grass...

huigensr at snf.stanford.edu huigensr at snf.stanford.edu
Wed Mar 18 20:07:03 PDT 2009


Standard DEEP recipe is showing heavy grassing in open areas. He flow appears to be low (approx. 0.5 sccm with a 10torr pressure), and resist is sometimes burning. 
...something is very wrong...




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