Problem stsetch SNF 2009-03-20 10:21:55: Update: Ran some wafers

huigensr at snf.stanford.edu huigensr at snf.stanford.edu
Fri Mar 20 10:21:56 PDT 2009


(please excuse spelling errors)It was noticed on Wednesday night by other users that some C4F8 may have condensed in the lines. The lines were then pumped for 1hr to hopefully remove the excess polymer. Subsequent wafers have shown a reasonable improvement in grass (less present), but grass still exists. The problem isn't fixed, but Elmer/Cesar seem to be on the right track. Elmer reports an above average C4F8 pressure on a calibration test, and the He flow continues to drop from the 2.8sccm set point with every wafer prossesed; each wafer loaded onto the chuck seems to adjust the He flow approx. 0.15sccm. On thursday night, the He flow was 2.3...now, after 6 wafers, the flow is 1.25 and dropping.




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