Shutdown stsetch SNF 2009-03-19 09:36:27: Backside He flow problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Mar 20 15:13:03 PDT 2009


Problem;
Inconsistent backside He flow and unreliable C4F8 flow.
Plan:
Repair the defective He shutoff valve and replace the C4F8 flow controller on Monday.
Please verify your process before committing your actual device.




More information about the stsetch-pcs mailing list