Shutdown stsetch SNF 2009-03-19 09:36:27: Backside He flow problem

eenriquez at eenriquez at
Fri Mar 20 15:13:03 PDT 2009

Inconsistent backside He flow and unreliable C4F8 flow.
Repair the defective He shutoff valve and replace the C4F8 flow controller on Monday.
Please verify your process before committing your actual device.

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