Shutdown stsetch SNF 2009-03-19 09:36:27: Backside He flow problem

[eenriquez at snf.stanford.edu]

Problem;
Inconsistent backside He flow and unreliable C4F8 flow.
Plan:
Repair the defective He shutoff valve and replace the C4F8 flow controller on Monday.
Please verify your process before committing your actual device.