Shutdown stsetch SNF 2009-03-23 07:51:21: Replacing C4F8 MFC

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 23 14:32:51 PDT 2009


Installed new C4F8 mfc.  Also installed a metering valve in the He cooling line.  Ran O2 plasma and DEEP recipe for 1 hour with no problems.
Please qualify your process before committing your actual device.




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