Comment stsetch SNF 2009-03-25 09:05:31: Maintenance check

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Mar 25 09:05:32 PDT 2009


Ran Deep recipe:  
pressure range as it cycled between etch/dep:  18 - 40 mT
Cooling He flow :  2.41 sccm




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