Problem stsetch SNF 2009-03-20 10:21:55: Update: Ran some wafers
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Mar 30 10:19:59 PDT 2009
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Problem stsetch SNF 2009-03-20 10:21:55: Update: Ran some wafers
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Shutdown stsetch SNF 2009-03-23 07:51:21: Replacing C4F8 MFC
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C4F8 mfc and He metering valve installed.
Previous message:
Problem stsetch SNF 2009-03-20 10:21:55: Update: Ran some wafers
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Shutdown stsetch SNF 2009-03-23 07:51:21: Replacing C4F8 MFC
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