Comment stsetch SNF 2009-03-30 10:33:06: Maintenance check

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 30 10:33:06 PDT 2009

Previous message: Comment stsetch SNF 2009-03-25 09:05:31: Maintenance check
Next message: Comment stsetch SNF 2009-03-30 10:33:06: Maintenance check
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ran Deep recipe:  
pressure range as it cycled between etch/dep:  18 - 40 mT
Cooling He flow :  2.39 sccm

Previous message: Comment stsetch SNF 2009-03-25 09:05:31: Maintenance check
Next message: Comment stsetch SNF 2009-03-30 10:33:06: Maintenance check
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list