Comment stsetch SNF 2009-03-30 10:33:06: Maintenance check

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 30 10:33:06 PDT 2009


Ran Deep recipe:  
pressure range as it cycled between etch/dep:  18 - 40 mT
Cooling He flow :  2.39 sccm




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