Problem stsetch SNF 2009-04-30 17:43:38: Won't perform pump down step

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri May 1 09:53:32 PDT 2009


Reset the system.  Cycled 3 wafers using the Deep recipe with no problems.  Backside He flow is ~ 2.4 sccm for all 3 wafers.




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